Dr. Bin Xu
at Tohoku Univ
SPIE Involvement:
Author
Publications (2)

PROCEEDINGS ARTICLE | June 22, 2013
Proc. SPIE. 8769, International Conference on Optics in Precision Engineering and Nanotechnology (icOPEN2013)
KEYWORDS: Microscopes, Diffraction, Metrology, Lenses, Computer programming, Atomic force microscopy, Profiling, Micro optics, Optical scanning systems, Diffraction gratings

PROCEEDINGS ARTICLE | November 16, 2011
Proc. SPIE. 8321, Seventh International Symposium on Precision Engineering Measurements and Instrumentation
KEYWORDS: Actuators, Optical components, Ferroelectric materials, Metrology, Sensors, Glasses, Atomic force microscopy, Neodymium, Tolerancing, Scanning tunneling microscopy

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