This keynote starts from an overview of micro-optics from fundamental functions, fabrication methods and applications
in precision engineering and nanotechnology. State-of-the-art measuring systems for surface form metrology of microoptics
with micro-structured surfaces, including diffractive micro-optics such as diffraction gratings and refractive
micro-optics such as micro lenses and micro-lens arrays, are then be presented. The measuring systems introduced in the
presentation are classified into scanning probe microscope-based systems, mechanical stylus profiling systems and
optical evaluation systems. Related research activities carried out in the authors' group are also highlighted.
This paper presents a micro-stylus probe, which is composed of a precision glass micro-ball and a shaft made by a glass
tube. The diameter of the micro-ball was 50 μm. The tip angle of the glass-tube shaft was approximately 10 degrees.
Strength test shows that the tolerance of glass tube micro-stylus against external forces is 90 mN. To reduce the stick-slip
phenomena, a micro-tapping probe employing the glass tube micro-stylus and a PZT actuator was demonstrated. The
micro-stylus probe was mounted to an air-bearing displacement sensor for scanning surface form metrology.
Experimental results showed that the micro-tapping probe was effective for reducing the influence of the stick-slip