Dr. Binod B. De
Senior Research Chemist at FUJIFILM Electronic Materials USA Inc
SPIE Involvement:
Author
Publications (1)

Proceedings Article | 12 June 2003
Proc. SPIE. 5039, Advances in Resist Technology and Processing XX
KEYWORDS: Lithography, Transparency, Etching, Chemical species, Polymers, Spectroscopy, Silicon, Silicon films, Absorbance, Semiconducting wafers

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