Dr. Bishnu P. Gogoi Profile

Dr. Bishnu P. Gogoi

Distinguished Member of Technical Staff at Evigia Systems Inc

SPIE Involvement:

Author

Publications (6)

Proceedings Article | 24 January 2004 Paper

Emerging MEMS technology and applications

Bishnu Gogoi

Proceedings Volume 5344, (2004) https://doi.org/10.1117/12.538381

KEYWORDS: Microelectromechanical systems, Sensors, CMOS technology, Semiconducting wafers, Etching, Manufacturing, Microsystems, Lithography, Silicon, Standards development

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Proceedings Article | 25 August 2000 Paper

Development of a low-stress silicon-rich silicon nitride film for micromachined sensor applications

Mark Williams, Jeff Smith, Judy Mark, George Matamis, Bishnu Gogoi

Proceedings Volume 4174, (2000) https://doi.org/10.1117/12.396464

KEYWORDS: Silicon, Etching, Silicon films, Sensors, Wet etching, Microelectromechanical systems, Oxides, Resistance, Semiconducting wafers, Refraction

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Proceedings Article | 25 August 2000 Paper

Development of polysilicon films for MEMS integration with submicrometer CMOS process

Brian McCarson, Benjamin Yip, Chris Reno, Jonathan Gorrell, Bishnu Gogoi

Proceedings Volume 4174, (2000) https://doi.org/10.1117/12.396463

KEYWORDS: Microelectromechanical systems, Gyroscopes, Sensors, Metals, Resistance

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Proceedings Article | 25 August 2000 Paper

Release etch modeling analysis and the use of laser scanning microscopy for etch time prediction of micromachined structures

George Matamis, Bishnu Gogoi, David Monk, Andrew McNeil, Veronica Burrows

Proceedings Volume 4174, (2000) https://doi.org/10.1117/12.396442

KEYWORDS: Etching, Laser scanners, Microscopy, Microelectromechanical systems, Manufacturing, Polysomnography, Data modeling, Nondestructive evaluation, Sensors

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