Dr. Biyao Cheng
at Xi’an Jiaotong Univ.
SPIE Involvement:
Author
Publications (1)

Proceedings Article | 7 March 2019 Paper
Proc. SPIE. 11053, Tenth International Symposium on Precision Engineering Measurements and Instrumentation
KEYWORDS: Electron beam lithography, Diffractive optical elements, Fabrication, Diffraction, Genetic algorithms, Super resolution, Optical design

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