Biyao Shen
at Tsinghua University
SPIE Involvement:
Author
Publications (1)

Proceedings Article | 21 June 2015
Proc. SPIE. 9526, Modeling Aspects in Optical Metrology V
KEYWORDS: Diffraction, Holography, Lithium, Polarization, Sensors, Photoresist materials, Ion beams, Tolerancing, Photoresist developing, Diffraction gratings

SIGN IN TO:
  • View contact details

UPDATE YOUR PROFILE
Is this your profile? Update it now.
Don’t have a profile and want one?

Advertisement
Advertisement
Back to Top