Dr. Björn Hansson
at Excillum AB
SPIE Involvement:
Author
Publications (7)

Proceedings Article | 24 March 2006
Proc. SPIE. 6151, Emerging Lithographic Technologies X
KEYWORDS: Mirrors, Multilayers, Light sources, Coating, Reflectivity, Atomic force microscopy, Solids, Extreme ultraviolet, Plasma, Tin

Proceedings Article | 24 March 2006
Proc. SPIE. 6151, Emerging Lithographic Technologies X
KEYWORDS: Optical amplifiers, Oscillators, High power lasers, Laser applications, Gas lasers, Extreme ultraviolet, Excimer lasers, Molybdenum, Neodymium lasers, Carbon monoxide

Proceedings Article | 23 March 2006
Proc. SPIE. 6151, Emerging Lithographic Technologies X
KEYWORDS: Mirrors, Metrology, Lithium, Ions, Reflectivity, Extreme ultraviolet, Extreme ultraviolet lithography, Prototyping, Plasma, Tin

Proceedings Article | 10 May 2005
Proc. SPIE. 5752, Metrology, Inspection, and Process Control for Microlithography XIX
KEYWORDS: Optical filters, Mirrors, Metrology, Lithium, Sensors, Spectroscopy, Photodiodes, Extreme ultraviolet, Plasma, Tin

Proceedings Article | 6 May 2005
Proc. SPIE. 5751, Emerging Lithographic Technologies IX
KEYWORDS: Mirrors, Lithium, Ions, Xenon, Extreme ultraviolet, Excimer lasers, Extreme ultraviolet lithography, Neodymium lasers, Plasma, Tin

Showing 5 of 7 publications
Conference Committee Involvement (4)
Advances in Laboratory-based X-Ray Sources, Optics, and Applications VII
13 August 2019 | San Diego, California, United States
Advances in Laboratory-based X-Ray Sources, Optics, and Applications VI
7 August 2017 | San Diego, California, United States
Advances in Laboratory-based X-Ray Sources, Optics, and Applications V
30 August 2016 | San Diego, California, United States
Advances in Laboratory-based X-Ray Sources, Optics, and Applications IV
10 August 2015 | San Diego, California, United States
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