Bo-Yun Hsueh
at United Microelectronics Corp
SPIE Involvement:
Publications (4)

Proceedings Article | 24 March 2009 Paper
Proceedings Volume 7272, 727231 (2009)
KEYWORDS: Semiconducting wafers, Overlay metrology, Process control, Control systems, Metrology, Error analysis, Scanners, Lithography, Immersion lithography, Environmental sensing

Proceedings Article | 24 March 2008 Paper
Bo Yun Hsueh, George Huang, Chun-Chi Yu, Jerry Hsu, Chin-Chou Kevin Huang, Chien-Jen Huang, David Tien
Proceedings Volume 6922, 69222Q (2008)
KEYWORDS: Semiconducting wafers, Overlay metrology, Data modeling, Statistical modeling, Immersion lithography, Scanners, Error analysis, Metrology, Lithography, Process control

Proceedings Article | 12 March 2008 Paper
Bo-Yun Hsueh, Hung-Yi Wu, Louis Jang, Met Yeh, Chen-Chin Yang, George K.C. Huang, Chun-Chi Yu, Allen Chang
Proceedings Volume 6924, 69244K (2008)
KEYWORDS: Critical dimension metrology, Lithography, Semiconducting wafers, Imaging systems, Laser scanners, 3D scanning, Laser stabilization, Tunable lasers, Spectroscopy, Coherence (optics)

Proceedings Article | 26 March 2007 Paper
Yung Feng Cheng, Yueh Lin Chou, Ting Cheng Tseng, Bo Yun Hsueh, Chuen Huei Yang
Proceedings Volume 6520, 65202N (2007)
KEYWORDS: Printing, Semiconducting wafers, Logic, Optical lithography, Resolution enhancement technologies, Photomasks, Double patterning technology, Etching, Image processing, Atrial fibrillation

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