Prof. Bo Li
Student at
SPIE Involvement:
Author
Publications (4)

SPIE Journal Paper | October 1, 2005
JM3 Vol. 4 Issue 04
KEYWORDS: Optical lithography, Microelectromechanical systems, Ultraviolet radiation, Silicon, Finite element methods, Semiconducting wafers, Lithium, Scanning electron microscopy, Near ultraviolet, Photomasks

PROCEEDINGS ARTICLE | January 22, 2005
Proc. SPIE. 5717, MEMS/MOEMS Components and Their Applications II
KEYWORDS: Microelectromechanical systems, Actuators, Ferroelectric materials, Aerospace engineering, Nickel, Silicon, Photoresist materials, Solids, Chemical mechanical planarization, Protactinium

PROCEEDINGS ARTICLE | January 24, 2004
Proc. SPIE. 5344, MEMS/MOEMS Components and Their Applications
KEYWORDS: Microelectromechanical systems, Near ultraviolet, Metals, Copper, Nickel, Silicon, Coating, Photoresist materials, Semiconducting wafers, Cryogenics

PROCEEDINGS ARTICLE | January 16, 2003
Proc. SPIE. 4981, MEMS Components and Applications for Industry, Automobiles, Aerospace, and Communication II
KEYWORDS: Actuators, Etching, Nickel, Silicon, Finite element methods, Microfabrication, Reactive ion etching, Semiconducting wafers, Shape memory alloys, Liquids

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