Prof. Bo Li Profile

Prof. Bo Li

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Publications (4)

SPIE Journal Paper | 1 October 2005

Low-stress ultra-thick SU-8 UV photolithography process for MEMS

Bo Li, Miao Liu, Quanfang Chen

JM3, Vol. 4, Issue 04, 043008, (October 2005) https://doi.org/10.1117/12.10.1117/1.2117108

KEYWORDS: Optical lithography, Microelectromechanical systems, Ultraviolet radiation, Silicon, Finite element methods, Semiconducting wafers, Lithium, Scanning electron microscopy, Near ultraviolet, Photomasks

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Proceedings Article | 22 January 2005 Paper

Development of robust self-assembled microvalves for robust hydraulic actuators

Bo Li, Sal Gerace, Quanfang Chen

Proceedings Volume 5717, (2005) https://doi.org/10.1117/12.600773

KEYWORDS: Nickel, Actuators, Ferroelectric materials, Silicon, Chemical mechanical planarization, Photoresist materials, Solids, Protactinium, Microelectromechanical systems, Aerospace engineering

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Proceedings Article | 24 January 2004 Paper

Low-stressed high-aspect-ratio ultrathick SU-8 UV-LIGA process for the fabrication of a micro heat exchanger

Bo Li, Quanfang Chen

Proceedings Volume 5344, (2004) https://doi.org/10.1117/12.524608

KEYWORDS: Nickel, Coating, Microelectromechanical systems, Semiconducting wafers, Near ultraviolet, Cryogenics, Copper, Silicon, Photoresist materials, Metals

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Proceedings Article | 16 January 2003 Paper

Robust microvalves for hydraulic actuators

Quanfang Chen, Bo Li, Jianwei Gong, Min Hu

Proceedings Volume 4981, (2003) https://doi.org/10.1117/12.479560

KEYWORDS: Actuators, Silicon, Nickel, Etching, Semiconducting wafers, Reactive ion etching, Liquids, Shape memory alloys, Finite element methods, Microfabrication

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