Prof. Bo Li Profile

Prof. Bo Li

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Publications (4)

SPIE Journal Paper | October 1, 2005

Low-stress ultra-thick SU-8 UV photolithography process for MEMS

Li, Bo , Liu, Miao , Chen, Quanfang

JM3 Vol. 4 Issue 04

KEYWORDS: Optical lithography, Microelectromechanical systems, Ultraviolet radiation, Silicon, Finite element methods, Semiconducting wafers, Lithium, Scanning electron microscopy, Near ultraviolet, Photomasks

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PROCEEDINGS ARTICLE | January 22, 2005

Development of robust self-assembled microvalves for robust hydraulic actuators

Proc. SPIE. 5717, MEMS/MOEMS Components and Their Applications II

KEYWORDS: Microelectromechanical systems, Actuators, Ferroelectric materials, Aerospace engineering, Nickel, Silicon, Photoresist materials, Solids, Chemical mechanical planarization, Protactinium

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PROCEEDINGS ARTICLE | January 24, 2004

Low-stressed high-aspect-ratio ultrathick SU-8 UV-LIGA process for the fabrication of a micro heat exchanger

Proc. SPIE. 5344, MEMS/MOEMS Components and Their Applications

KEYWORDS: Microelectromechanical systems, Near ultraviolet, Metals, Copper, Nickel, Silicon, Coating, Photoresist materials, Semiconducting wafers, Cryogenics

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PROCEEDINGS ARTICLE | January 16, 2003

Robust microvalves for hydraulic actuators

Proc. SPIE. 4981, MEMS Components and Applications for Industry, Automobiles, Aerospace, and Communication II

KEYWORDS: Actuators, Etching, Nickel, Silicon, Finite element methods, Microfabrication, Reactive ion etching, Semiconducting wafers, Shape memory alloys, Liquids

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