Dr. Bo Li
Staff Scientist at Honeywell Inc
SPIE Involvement:
Author
Publications (1)

PROCEEDINGS ARTICLE | May 4, 2005
Proc. SPIE. 5753, Advances in Resist Technology and Processing XXII
KEYWORDS: Lithography, Optical lithography, Etching, Polymers, Silicon, Reflectivity, Photoresist materials, Wet etching, Plasma etching, Plasma

SIGN IN TO:
  • View contact details

UPDATE YOUR PROFILE
Is this your profile? Update it now.
Don’t have a profile and want one?

Back to Top