Dr. Bo Mu
at Quanergy Systems, Inc.
SPIE Involvement:
Conference Program Committee | Author
Publications (10)

Proceedings Article | 25 September 2010
Proc. SPIE. 7823, Photomask Technology 2010
KEYWORDS: Reticles, Contamination, Defect detection, Air contamination, Metals, Inspection, Wafer inspection, Photomasks, SRAF, Semiconducting wafers

Proceedings Article | 20 March 2010
Proc. SPIE. 7636, Extreme Ultraviolet (EUV) Lithography
KEYWORDS: Reticles, Optical lithography, Defect detection, Inspection, Scanning electron microscopy, Photomasks, Extreme ultraviolet, Line edge roughness, Semiconducting wafers, Defect inspection

Proceedings Article | 23 September 2009
Proc. SPIE. 7488, Photomask Technology 2009
KEYWORDS: Lithography, Reticles, Image processing, Manufacturing, Inspection, Image resolution, Photomasks, Source mask optimization, Semiconducting wafers, Binary data

Proceedings Article | 11 May 2009
Proc. SPIE. 7379, Photomask and Next-Generation Lithography Mask Technology XVI
KEYWORDS: Reticles, Logic, Detection and tracking algorithms, Imaging systems, Sensors, Databases, Inspection, Photomasks, SRAF, Critical dimension metrology

Proceedings Article | 24 March 2009
Proc. SPIE. 7272, Metrology, Inspection, and Process Control for Microlithography XXIII
KEYWORDS: Signal to noise ratio, Reticles, Logic, Detection and tracking algorithms, Imaging systems, Sensors, Inspection, SRAF, Prototyping, Digital breast tomosynthesis

Proceedings Article | 17 October 2008
Proc. SPIE. 7122, Photomask Technology 2008
KEYWORDS: Signal to noise ratio, Reticles, Defect detection, Detection and tracking algorithms, Spatial frequencies, Sensors, Image processing, Inspection, Modulation transfer functions, Line edge roughness

Showing 5 of 10 publications
Conference Committee Involvement (3)
Digital Photography and Mobile Imaging XI
9 February 2015 | San Francisco, California, United States
Digital Photography X
3 February 2014 | San Francisco, California, United States
Digital Photography IX
4 February 2013 | Burlingame, California, United States
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