Dr. Bo Yu
at CIOMP
SPIE Involvement:
Author
Publications (4)

SPIE Journal Paper | 18 October 2019
Shizhuang Sun, Chunshui Jin, Bo Yu, Tao Guo, Shun Yao, Wenyuan Deng, Chun Li
OE, Vol. 58, Issue 10, 107102, (October 2019) https://doi.org/10.1117/12.10.1117/1.OE.58.10.107102
KEYWORDS: Coating, Extreme ultraviolet, Multilayers, Particles, Mirrors, Reflectivity, Extreme ultraviolet lithography, Sputter deposition, Diffraction gratings, Optical filters

Proceedings Article | 19 March 2018 Paper
Bo Yu, Liping Wang, Hailiang Li, Yao Xie, Hui Wang, Haitao Zhang, Shun Yao, Yu Liu, Jie Yu, Chun Li, Changqing Xie, Chunshui Jin
Proceedings Volume 10583, 105831T (2018) https://doi.org/10.1117/12.2294479
KEYWORDS: Silicon, Multilayers, Reflectivity, Molybdenum, Extreme ultraviolet, Crystals, Sputter deposition, Argon, Ions, Extreme ultraviolet lithography

Proceedings Article | 25 October 2016 Paper
Bo Yu, Chun-shui Jin, Shun Yao
Proceedings Volume 9687, 96870A (2016) https://doi.org/10.1117/12.2246160
KEYWORDS: X-rays, Sputter deposition, Multilayers, Coating, Mirrors, Genetic algorithms, Extreme ultraviolet, Reflectivity, X-ray optics, EUV optics

Proceedings Article | 27 September 2016 Paper
Shun Yao, Bo Yu, Jingcheng Jin, Chun Li
Proceedings Volume 9684, 968442 (2016) https://doi.org/10.1117/12.2246196
KEYWORDS: Photoresist materials, Spectroscopy, Reflectivity, Refractive index, Semiconducting wafers, Silicon, Data modeling, Spectrographs, Ellipsometry, Dielectric polarization

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