Bo Zhou
at Beihang Univ
SPIE Involvement:
Author
Publications (2)

PROCEEDINGS ARTICLE | March 11, 2008
Proc. SPIE. 6984, Sixth International Conference on Thin Film Physics and Applications
KEYWORDS: Thin films, Sputter deposition, Crystals, Silicon, Surface roughness, Scanning electron microscopy, Transmittance, Zinc oxide, Thin film devices, Protactinium

PROCEEDINGS ARTICLE | March 11, 2008
Proc. SPIE. 6984, Sixth International Conference on Thin Film Physics and Applications
KEYWORDS: Amorphous silicon, Thin films, Glasses, Interfaces, Silicon, Surface roughness, Doping, Distortion, Silicon films, Plasma enhanced chemical vapor deposition

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