Dr. Boaz Brill
CEO at GluSense Ltd
SPIE Involvement:
Author
Publications (9)

SPIE Journal Paper | 1 October 2011
Alok Vaid, Bin Bin Yan, Yun Tao Jiang, Mark Kelling, Carsten Hartig, John Allgair, Peter Ebersbach, Matthew Sendelbach, Narender Rana, Ahmad Katnani, Erin McLellan, Charles Archie, Cornel Bozdog, Helen Kim, Michael Sendler, Susan Ng, Boris Sherman, Boaz Brill, Igor Turovets, Ronen Urensky
JM3, Vol. 10, Issue 04, 043016, (October 2011) https://doi.org/10.1117/12.10.1117/1.3655726
KEYWORDS: Metrology, Scatterometry, Critical dimension metrology, Semiconducting wafers, Data modeling, Atomic force microscopy, Transmission electron microscopy, Inspection, 3D metrology

Proceedings Article | 20 April 2011 Paper
Proceedings Volume 7971, 797113 (2011) https://doi.org/10.1117/12.881638
KEYWORDS: Etching, Scatterometry, Channel projecting optics, Metrology, Data modeling, Polarization, Optics manufacturing, Metals, Semiconducting wafers

Proceedings Article | 29 March 2011 Paper
Proceedings Volume 7971, 797103 (2011) https://doi.org/10.1117/12.881632
KEYWORDS: Metrology, Critical dimension metrology, Scatterometry, Semiconducting wafers, Metals, Transmission electron microscopy, Data modeling, Atomic force microscopy, Inspection

Proceedings Article | 2 April 2010 Paper
Benjamin Bunday, Valery Sorin, Shahar Gov, Boaz Brill, Tal Marcu, Dani Hak
Proceedings Volume 7638, 76380P (2010) https://doi.org/10.1117/12.846449
KEYWORDS: Line edge roughness, Diffraction, Reflectance spectroscopy, Scattering, Rayleigh scattering, Oxides, Field spectroscopy, Reflectometry, Spectroscopy, Amplifiers

Proceedings Article | 23 March 2009 Paper
Michael Sendler, Stanislav Stepanov, Yoel Cohen, Victor Kucherov, Boaz Brill, Matthew Sendelbach, Carsten Hartig, Hyang Kyun Kim, Cornel Bozdog, Alok Vaid
Proceedings Volume 7272, 72720V (2009) https://doi.org/10.1117/12.814380
KEYWORDS: Scatterometry, Material characterization, Optical properties, Semiconducting wafers, Metals, Critical dimension metrology, Etching, Silicon, Metrology, Wafer-level optics

Showing 5 of 9 publications
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