Dr. Boaz Brill
CEO at GluSense Ltd
SPIE Involvement:
Author
Publications (9)

SPIE Journal Paper | 1 October 2011
JM3 Vol. 10 Issue 04
KEYWORDS: Metrology, Scatterometry, Critical dimension metrology, Semiconducting wafers, Data modeling, Atomic force microscopy, Transmission electron microscopy, Inspection, 3D metrology

Proceedings Article | 20 April 2011 Paper
Proc. SPIE. 7971, Metrology, Inspection, and Process Control for Microlithography XXV
KEYWORDS: Metrology, Data modeling, Polarization, Etching, Metals, Scatterometry, Semiconducting wafers, Optics manufacturing, Channel projecting optics

Proceedings Article | 29 March 2011 Paper
Proc. SPIE. 7971, Metrology, Inspection, and Process Control for Microlithography XXV
KEYWORDS: Metrology, Data modeling, Metals, Inspection, Atomic force microscopy, Transmission electron microscopy, Scatterometry, Critical dimension metrology, Semiconducting wafers

Proceedings Article | 2 April 2010 Paper
Proc. SPIE. 7638, Metrology, Inspection, and Process Control for Microlithography XXIV
KEYWORDS: Oxides, Diffraction, Scattering, Spectroscopy, Amplifiers, Reflectometry, Rayleigh scattering, Field spectroscopy, Reflectance spectroscopy, Line edge roughness

Proceedings Article | 23 March 2009 Paper
Proc. SPIE. 7272, Metrology, Inspection, and Process Control for Microlithography XXIII
KEYWORDS: Wafer-level optics, Metrology, Optical properties, Etching, Metals, Silicon, Scatterometry, Critical dimension metrology, Semiconducting wafers, Material characterization

Showing 5 of 9 publications
SIGN IN TO:
  • View contact details

UPDATE YOUR PROFILE
Is this your profile? Update it now.
Don’t have a profile and want one?

Advertisement
Advertisement
Back to Top