Dr. Bob Rollinger
Senior Researcher at ETH Zürich
SPIE Involvement:
Author
Publications (12)

SPIE Journal Paper | 5 August 2015
JM3 Vol. 14 Issue 03
KEYWORDS: Plasma, Vacuum ultraviolet, Tin, Gallium, Light sources, Ions, Indium, Extreme ultraviolet, Calibration, Inspection

Proceedings Article | 19 March 2015
Proc. SPIE. 9422, Extreme Ultraviolet (EUV) Lithography VI
KEYWORDS: Light sources, Inspection, Control systems, Photomasks, Extreme ultraviolet, Extreme ultraviolet lithography, Coded apertures, Plasma, Tin, Aluminium phosphide

Proceedings Article | 19 March 2015
Proc. SPIE. 9424, Metrology, Inspection, and Process Control for Microlithography XXIX
KEYWORDS: Light sources, Ions, Indium, Inspection, Wafer inspection, Extreme ultraviolet, Vacuum ultraviolet, Gallium, Plasma, Tin

Proceedings Article | 17 April 2014
Proc. SPIE. 9048, Extreme Ultraviolet (EUV) Lithography V
KEYWORDS: Light sources, Metrology, High power lasers, Nd:YAG lasers, Inspection, Extreme ultraviolet, Extreme ultraviolet lithography, Plasma, Tin, Aluminium phosphide

Proceedings Article | 17 April 2014
Proc. SPIE. 9048, Extreme Ultraviolet (EUV) Lithography V
KEYWORDS: Sensors, High power lasers, Particles, Ions, Laser development, Extreme ultraviolet, Extreme ultraviolet lithography, Plasma, Tin, Aluminium phosphide

Showing 5 of 12 publications
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