Dr. Bob Rollinger
Senior Researcher at ETH Zürich
SPIE Involvement:
Author
Publications (12)

SPIE Journal Paper | 5 August 2015
JM3 Vol. 14 Issue 03
KEYWORDS: Plasma, Vacuum ultraviolet, Tin, Gallium, Light sources, Ions, Indium, Extreme ultraviolet, Calibration, Inspection

Proceedings Article | 19 March 2015 Paper
Proc. SPIE. 9422, Extreme Ultraviolet (EUV) Lithography VI
KEYWORDS: Extreme ultraviolet, Plasma, Inspection, Tin, Extreme ultraviolet lithography, Coded apertures, Aluminium phosphide, Light sources, Photomasks, Control systems

Proceedings Article | 19 March 2015 Paper
Proc. SPIE. 9424, Metrology, Inspection, and Process Control for Microlithography XXIX
KEYWORDS: Plasma, Vacuum ultraviolet, Tin, Gallium, Light sources, Indium, Inspection, Extreme ultraviolet, Ions, Wafer inspection

Proceedings Article | 17 April 2014 Paper
Proc. SPIE. 9048, Extreme Ultraviolet (EUV) Lithography V
KEYWORDS: Extreme ultraviolet, Inspection, Aluminium phosphide, Tin, Plasma, Extreme ultraviolet lithography, Light sources, Metrology, High power lasers, Nd:YAG lasers

Proceedings Article | 17 April 2014 Paper
Proc. SPIE. 9048, Extreme Ultraviolet (EUV) Lithography V
KEYWORDS: Plasma, Ions, Extreme ultraviolet, Sensors, Aluminium phosphide, Tin, Extreme ultraviolet lithography, High power lasers, Particles, Laser development

Showing 5 of 12 publications
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