Dr. Bodo Ehlers Profile

Dr. Bodo Ehlers

Manager, Optical Engineering at KLA Corp.

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Proceedings Article | 18 March 2014 Paper

Development of an EUVL collector with infrared radiation suppression

Michael Kriese, Yuriy Platonov, Bodo Ehlers, Licai Jiang, Jim Rodriguez, Ulrich Mueller, Jay Daniel, Shayna Khatri, Adam Magruder, Steven Grantham, Charles Tarrio, Thomas Lucatorto

Proceedings Volume 9048, 90483C (2014) https://doi.org/10.1117/12.2049279

KEYWORDS: Extreme ultraviolet, Reflectivity, Infrared radiation, Extreme ultraviolet lithography, Plasma, Infrared technology, Neodymium, Nickel, Surface finishing, Diffraction gratings

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Proceedings Article | 28 September 2011 Paper

Johansson crystals for x-ray diffractometry and demanding spectroscopy applications

Boris Verman, Bodo Ehlers, Bonglea Kim, Doug Wilcox, Licai Jiang

Proceedings Volume 8139, 81390L (2011) https://doi.org/10.1117/12.893739

KEYWORDS: Crystals, X-rays, Laser crystals, Germanium, Crystal optics, X-ray diffraction, Silicon, Reflection, Cameras, Copper

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Proceedings Article | 27 August 2010 Paper

Investigation of aberrations of Kirkpatrick-Baez mirrors

Bodo Ehlers, Boris Verman

Proceedings Volume 7802, 78020F (2010) https://doi.org/10.1117/12.859850

KEYWORDS: Mirrors, X-rays, X-ray optics, Reflection, Chromium, Nonimaging optics, Molybdenum, Optical design, Free electron lasers, Copper

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Proceedings Article | 14 February 2007 Paper

Experimental and theoretical study of a coaxial, hybrid-stable-unstable resonator for high-power lasers

Bodo Ehlers, Jochen Deile, Shadi Sumrain, Viktor Granson, Francisco Villarreal, Viorel Negoita

Proceedings Volume 6452, 64520G (2007) https://doi.org/10.1117/12.700864

KEYWORDS: Mirrors, Resonators, Axicons, Electrodes, Gas lasers, Laser resonators, High power lasers, Laser beam propagation, Carbon monoxide, Laser cutting

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Proceedings Article | 19 June 2003 Paper

Fiber-coupled high-brightness high-power diode laser for solid-state laser pumping and material processing

Bodo Ehlers, Stefan Heinemann, Falk Doerfel

Proceedings Volume 4973, (2003) https://doi.org/10.1117/12.478369

KEYWORDS: Semiconductor lasers, Laser systems engineering, Solid state lasers, Tolerancing, Transformers, Materials processing, Optical components, Fiber lasers, Beam splitters, Polarization

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Proceedings Article | 14 April 2000 Paper

Cylindrical zoom optics for high-power diode lasers

Bodo Ehlers, Urban Walz, Stefan Heinemann

Proceedings Volume 3929, (2000) https://doi.org/10.1117/12.382763

KEYWORDS: Zoom lenses, Semiconductor lasers, High power diode lasers, Optics manufacturing, Optical design, Collimation, Laser applications, Laser optics, Aluminum, Laser sources

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Proceedings Article | 29 March 2000 Paper

Hardening and welding with high-power diode lasers

Bodo Ehlers, Hans-Joachim Herfurth, Stefan Heinemann

Proceedings Volume 3945, (2000) https://doi.org/10.1117/12.380556

KEYWORDS: Semiconductor lasers, Laser welding, Aluminum, Metals, Absorption, Nd:YAG lasers, High power diode lasers, Laser applications, Heat treatments, Process control

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Proceedings Article | 13 May 1998 Paper

Fiber-coupling technique for high-power diode laser arrays

Hans-Georg Treusch, Keming Du, Markus Baumann, Volker Sturm, Bodo Ehlers, Peter Loosen

Proceedings Volume 3267, (1998) https://doi.org/10.1117/12.308097

KEYWORDS: Semiconductor lasers, Diodes, Microlens, Collimation, Mirrors, Beam shaping, Fiber couplers, Manufacturing, Materials processing, Dielectric filters

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Proceedings Article | 18 August 1997 Paper

Compact fiber-coupled high-power diode-laser unit

Markus Baumann, Bodo Ehlers, Michael Quade, Keming Du, Hans-Georg Treusch, Peter Loosen, Reinhart Poprawe

Proceedings Volume 3097, (1997) https://doi.org/10.1117/12.281140

KEYWORDS: Multimode fibers, Fiber lasers, Materials processing

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Proceedings Article | 18 August 1997 Paper

Beam shaping and fiber coupling of high-power diode laser arrays

Bodo Ehlers, Keming Du, Markus Baumann, Hans-Georg Treusch, Peter Loosen, Reinhart Poprawe

Proceedings Volume 3097, (1997) https://doi.org/10.1117/12.281128

KEYWORDS: Semiconductor lasers, Beam shaping, Mirrors, Diodes, Manufacturing, Materials processing, Collimation, Fiber coupled lasers, Fiber couplers, Multimode fibers

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Showing 5 of 10 publications

Conference Committee Involvement (1)

High-Power Diode Laser Technology and Applications III

24 January 2005 | San Jose, California, United States

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