Mr. Bong Sang Ko
at First Silicon
SPIE Involvement:
Author
Publications (1)

PROCEEDINGS ARTICLE | May 24, 2004
Proc. SPIE. 5375, Metrology, Inspection, and Process Control for Microlithography XVIII
KEYWORDS: Optical lithography, Deep ultraviolet, Etching, Polymers, Diffusion, Atomic force microscopy, Scanning electron microscopy, Photoresist materials, Semiconducting wafers, Photoresist developing

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