Dr. Bongseok Choi Profile

Dr. Bongseok Choi

at National Institute for Materials Science

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Author

Publications (3)

SPIE Journal Paper | 21 May 2014 Open Access

Photoluminescence-enhanced plasmonic substrates fabricated by nanoimprint lithography

Bongseok Choi, Masanobu Iwanaga, Hideki Miyazaki, Kazuaki Sakoda, Yoshimasa Sugimoto

JM3, Vol. 13, Issue 02, 023007, (May 2014) https://doi.org/10.1117/12.10.1117/1.JMM.13.2.023007

KEYWORDS: Photonic integrated circuits, Gold, Plasmonics, Silicon, Nanoimprint lithography, Molecules, Nanolithography, Semiconducting wafers, Reflection, Ultraviolet radiation

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Proceedings Article | 7 March 2014 Paper

Emission-enhanced plasmonic substrates fabricated by nano-imprint lithography

Bongseok Choi, Masanobu Iwanaga, Hideki Miyazaki, Kazuaki Sakoda, Yoshimasa Sugimoto

Proceedings Volume 8974, 89740W (2014) https://doi.org/10.1117/12.2037190

KEYWORDS: Photonic integrated circuits, Gold, Plasmonics, Silicon, Reflection, Molecules, Semiconducting wafers, Nanoimprint lithography, Ultraviolet radiation, Nanolithography

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Proceedings Article | 12 December 2009 Paper

Control of CD errors and hotspots by using a design based verification system

Bong-Seok Choi, Sang-Ho Lee, Young-Seog Kang, Woo-Sung Han

Proceedings Volume 7520, 75201X (2009) https://doi.org/10.1117/12.839644

KEYWORDS: Critical dimension metrology, Optical proximity correction, Semiconducting wafers, Control systems, Reticles, Scanners, Computer aided design, Etching, Inspection, Lithography

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