Dr. Bongseok Choi
at National Institute for Materials Science
SPIE Involvement:
Author
Publications (3)

SPIE Journal Paper | 21 May 2014
JM3 Vol. 13 Issue 02
KEYWORDS: Photonic integrated circuits, Gold, Plasmonics, Silicon, Nanoimprint lithography, Molecules, Nanolithography, Semiconducting wafers, Reflection, Ultraviolet radiation

Proceedings Article | 7 March 2014
Proc. SPIE. 8974, Advanced Fabrication Technologies for Micro/Nano Optics and Photonics VII
KEYWORDS: Gold, Plasmonics, Reflection, Ultraviolet radiation, Molecules, Silicon, Photonic integrated circuits, Nanoimprint lithography, Semiconducting wafers, Nanolithography

Proceedings Article | 12 December 2009
Proc. SPIE. 7520, Lithography Asia 2009
KEYWORDS: Lithography, Reticles, Etching, Scanners, Inspection, Control systems, Optical proximity correction, Computer aided design, Critical dimension metrology, Semiconducting wafers

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