Prof. BongSoo Kim Profile

Prof. BongSoo Kim

Assistant Professor at Ewha Womans Univ

SPIE Involvement:

Author

Publications (1)

Proceedings Article | 29 December 2004 Paper

Chang Ok Kim, Jie Won Jung, Minju Kim, Tai-Hee Kang, Kyuwook Ihm, Ki-Jeong Kim, Bongsoo Kim, Joon Won Park, Hyun-Woo Nam, Kwang-Jin Hwang

Proceedings Volume 5593, (2004) https://doi.org/10.1117/12.570071

KEYWORDS: Silicon, Nitrogen, Semiconducting wafers, Electron beams, Gold, Carbon, Chemical species, Absorption, Argon, Electron beam lithography

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Keywords/Phrases