Dr. Bongkeun Kim
at Materials Research Lab
SPIE Involvement:
Author
Publications (7)

PROCEEDINGS ARTICLE | March 27, 2015
Proc. SPIE. 9423, Alternative Lithographic Technologies VII
KEYWORDS: Lithography, Lithium, Roentgenium, Polymers, Ions, Directed self assembly, Double patterning technology, Neodymium, Toxic industrial chemicals, Industrial chemicals

SPIE Journal Paper | February 5, 2015
JM3 Vol. 14 Issue 01
KEYWORDS: Polymethylmethacrylate, Thermal effects, Critical dimension metrology, Error analysis, Lithography, Overlay metrology, Picosecond phenomena, Polymers, Directed self assembly

PROCEEDINGS ARTICLE | March 28, 2014
Proc. SPIE. 9049, Alternative Lithographic Technologies VI
KEYWORDS: Lithography, Roentgenium, Polymers, Surface roughness, Wave propagation, Thermal effects, Directed self assembly, Line edge roughness, Phase shifts, Bohrium

PROCEEDINGS ARTICLE | March 28, 2014
Proc. SPIE. 9049, Alternative Lithographic Technologies VI
KEYWORDS: Lithography, Diamond, Optical lithography, Polymethylmethacrylate, Cadmium, Bridges, Directed self assembly, Charge-coupled devices, Analytical research, Critical dimension metrology

PROCEEDINGS ARTICLE | March 28, 2014
Proc. SPIE. 9049, Alternative Lithographic Technologies VI
KEYWORDS: Lithography, Polymethylmethacrylate, Cadmium, Polymers, Error analysis, Computer simulations, Thermal effects, Directed self assembly, Picosecond phenomena, Critical dimension metrology

PROCEEDINGS ARTICLE | March 26, 2013
Proc. SPIE. 8680, Alternative Lithographic Technologies V
KEYWORDS: Thin films, Electron beam lithography, Optical lithography, Roentgenium, Polymers, Chemistry, Computer simulations, Directed self assembly, Analytical research, Systems modeling

Showing 5 of 7 publications
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