Dr. Boris Kobrin
CEO at Innovasonic Inc
SPIE Involvement:
Author
Publications (8)

Proceedings Article | 7 March 2014 Paper
Proc. SPIE. 8974, Advanced Fabrication Technologies for Micro/Nano Optics and Photonics VII
KEYWORDS: Lithography, Nanostructures, Antireflective coatings, Optical lithography, Glasses, Ultraviolet radiation, Reflectivity, Refraction, Photomasks, Cones

Proceedings Article | 8 February 2012 Paper
Proc. SPIE. 8249, Advanced Fabrication Technologies for Micro/Nano Optics and Photonics V
KEYWORDS: Lithography, Nanostructures, Optical lithography, Nanostructuring, Glasses, Ultraviolet radiation, Printing, Near field, Photomasks, Nanolithography

Proceedings Article | 23 March 2006 Paper
Proc. SPIE. 6151, Emerging Lithographic Technologies X
KEYWORDS: Lithography, Silicon, Coating, Process control, Deposition processes, Nanoimprint lithography, Photoresist processing, Self-assembled monolayers, Plasma, Liquids

Proceedings Article | 22 January 2005 Paper
Proc. SPIE. 5716, Reliability, Packaging, Testing, and Characterization of MEMS/MOEMS IV
KEYWORDS: Microelectromechanical systems, Polymers, Glasses, Silicon, Manufacturing, Reliability, Optical coatings, Self-assembled monolayers, Plastic coatings, Liquids

Proceedings Article | 30 December 2003 Paper
Proc. SPIE. 5342, Micromachining and Microfabrication Process Technology IX
KEYWORDS: Microelectromechanical systems, Coating, Reliability, Process control, Deposition processes, Semiconducting wafers, Self-assembled monolayers, Plasma treatment, Plasma, Liquids

Showing 5 of 8 publications
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