Dr. Boris Kobrin
Chief Technology Officer at Metamaterial Technologies Inc
SPIE Involvement:
Publications (8)

Proceedings Article | 7 March 2014
Proc. SPIE. 8974, Advanced Fabrication Technologies for Micro/Nano Optics and Photonics VII
KEYWORDS: Photomasks, Lithography, Antireflective coatings, Nanostructures, Reflectivity, Glasses, Cones, Optical lithography, Ultraviolet radiation, Refraction

Proceedings Article | 8 February 2012
Proc. SPIE. 8249, Advanced Fabrication Technologies for Micro/Nano Optics and Photonics V
KEYWORDS: Photomasks, Nanolithography, Lithography, Nanostructures, Nanostructuring, Printing, Optical lithography, Near field, Ultraviolet radiation, Glasses

Proceedings Article | 23 March 2006
Proc. SPIE. 6151, Emerging Lithographic Technologies X
KEYWORDS: Nanoimprint lithography, Liquids, Lithography, Coating, Deposition processes, Silicon, Self-assembled monolayers, Photoresist processing, Process control, Plasma

Proceedings Article | 22 January 2005
Proc. SPIE. 5716, Reliability, Packaging, Testing, and Characterization of MEMS/MOEMS IV
KEYWORDS: Self-assembled monolayers, Silicon, Glasses, Liquids, Microelectromechanical systems, Reliability, Optical coatings, Plastic coatings, Polymers, Manufacturing

Proceedings Article | 30 December 2003
Proc. SPIE. 5342, Micromachining and Microfabrication Process Technology IX
KEYWORDS: Coating, Microelectromechanical systems, Deposition processes, Semiconducting wafers, Plasma treatment, Plasma, Liquids, Self-assembled monolayers, Process control, Reliability

Showing 5 of 8 publications
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