Dr. Boris Menchtchikov
at ASML Brion
SPIE Involvement:
Author
Publications (3)

PROCEEDINGS ARTICLE | March 30, 2017
Proc. SPIE. 10147, Optical Microlithography XXX
KEYWORDS: Avalanche photodetectors, Optical lithography, Sensors, Scanners, Signal processing, Far infrared, Optical alignment, Semiconducting wafers, Signal detection, Overlay metrology

PROCEEDINGS ARTICLE | March 24, 2016
Proc. SPIE. 9778, Metrology, Inspection, and Process Control for Microlithography XXX
KEYWORDS: Metrology, Avalanche photodetectors, Optical lithography, Etching, Scanners, Silicon, Optical alignment, Semiconducting wafers, Overlay metrology, Chemical mechanical planarization

PROCEEDINGS ARTICLE | April 12, 2013
Proc. SPIE. 8683, Optical Microlithography XXVI
KEYWORDS: Actuators, Lithography, Reticles, Metrology, Calibration, Scanners, Control systems, Photomasks, Semiconducting wafers, Overlay metrology

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