Dr. Boris Sherman
Project Manager at Nova Measuring Instruments Ltd
SPIE Involvement:
Author
Publications (5)

SPIE Journal Paper | 1 October 2011
JM3 Vol. 10 Issue 04
KEYWORDS: Metrology, Scatterometry, Critical dimension metrology, Semiconducting wafers, Data modeling, Atomic force microscopy, Transmission electron microscopy, Inspection, 3D metrology

Proceedings Article | 20 April 2011
Proc. SPIE. 7971, Metrology, Inspection, and Process Control for Microlithography XXV
KEYWORDS: Metrology, Data modeling, Polarization, Etching, Metals, Scatterometry, Semiconducting wafers, Optics manufacturing, Channel projecting optics

Proceedings Article | 29 March 2011
Proc. SPIE. 7971, Metrology, Inspection, and Process Control for Microlithography XXV
KEYWORDS: Metrology, Data modeling, Metals, Inspection, Atomic force microscopy, Transmission electron microscopy, Scatterometry, Critical dimension metrology, Semiconducting wafers

Proceedings Article | 29 April 2004
Proc. SPIE. 5378, Data Analysis and Modeling for Process Control
KEYWORDS: Sensors, Image segmentation, Particles, Electrons, Reflectivity, 3D modeling, Scanning electron microscopy, 3D vision, 3D image processing, Diffusion tensor imaging

Proceedings Article | 12 July 2002
Proc. SPIE. 4692, Design, Process Integration, and Characterization for Microelectronics
KEYWORDS: Contamination, Etching, Metals, Manufacturing, Inspection, Scanning electron microscopy, Microelectronics, Semiconducting wafers, Chemical mechanical planarization, Discrete inspection

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