Dr. Boris Vandewalle
at IMEC
SPIE Involvement:
Author
Publications (2)

PROCEEDINGS ARTICLE | March 18, 2015
Proc. SPIE. 9427, Design-Process-Technology Co-optimization for Manufacturability IX
KEYWORDS: Lithography, Optical lithography, Metals, Manufacturing, Scanning electron microscopy, Capacitance, Photomasks, Optical proximity correction, Semiconducting wafers, Standards development

PROCEEDINGS ARTICLE | March 28, 2014
Proc. SPIE. 9053, Design-Process-Technology Co-optimization for Manufacturability VIII
KEYWORDS: Lithography, Logic, Optical lithography, Etching, Argon, Metals, Extreme ultraviolet, Extreme ultraviolet lithography, Double patterning technology, Computational lithography

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