Boyin Liu
at Monash Univ
SPIE Involvement:
Author
Publications (2)

Proceedings Article | 7 December 2013
Proc. SPIE. 8923, Micro/Nano Materials, Devices, and Systems
KEYWORDS: Particles, Bacteria, Ion beams, Finite element methods, Silicon, Silicon films, Microfluidics, Liquids, Scanning electron microscopy, Manufacturing

Proceedings Article | 7 December 2013
Proc. SPIE. 8923, Micro/Nano Materials, Devices, and Systems
KEYWORDS: Actuators, Silicon, Finite element methods, Interfaces, Biosensing, Modeling, Microactuators, Temperature metrology, Prototyping, Coating

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