Brad Williams
CEO at Capitol Scientific Dallas LLC
SPIE Involvement:
Author
Publications (2)

Proceedings Article | 11 June 1999
Proc. SPIE. 3678, Advances in Resist Technology and Processing XVI
KEYWORDS: Critical dimension metrology, Deep ultraviolet, Reflectivity, Semiconducting wafers, Oxides, Antireflective coatings, Photoresist processing, Lithography, Chemical mechanical planarization, Thin film coatings

Proceedings Article | 29 June 1998
Proc. SPIE. 3333, Advances in Resist Technology and Processing XV
KEYWORDS: Semiconducting wafers, Photoresist materials, Reflectivity, Coating, Thin film coatings, Etching, Silicon, Antireflective coatings, Silicon films, Quartz

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