Dr. Brandon L. Ward
SPIE Involvement:
Publications (4)

Proceedings Article | 24 March 2017 Presentation + Paper
Andrew Liang, Jan Hermans, Timothy Tran, Katja Viatkina, Chen-Wei Liang, Brandon Ward, Steven Chuang, Jengyi Yu, Greg Harm, Jelle Vandereyken, David Rio, Michael Kubis, Samantha Tan, Mircea Dusa, Akhil Singhal, Bart van Schravendijk, Girish Dixit, Nader Shamma, Rich Wise, Sirish Reddy
Proceedings Volume 10143, 1014319 (2017) https://doi.org/10.1117/12.2258192
KEYWORDS: Extreme ultraviolet lithography, Etching, Extreme ultraviolet, Lithography, High volume manufacturing, Stochastic processes, Plasma etching, Reactive ion etching, Plasma enhanced chemical vapor deposition, Focus stacking software, Photomasks

Proceedings Article | 1 April 2008 Paper
Proceedings Volume 6924, 69241H (2008) https://doi.org/10.1117/12.773021
KEYWORDS: Optical proximity correction, Scanning electron microscopy, Illumination engineering, Resolution enhancement technologies, Bridges, Printing, Aberration correction, Semiconducting wafers, Algorithm development, Manufacturing

Proceedings Article | 11 April 2007 Paper
Proceedings Volume 6519, 651919 (2007) https://doi.org/10.1117/12.712319
KEYWORDS: Line edge roughness, Etching, Photoresist materials, Spatial frequencies, Lithography, Smoothing, Image processing, Critical dimension metrology, Semiconducting wafers, Photoresist processing

Proceedings Article | 10 May 2005 Paper
Proceedings Volume 5752, (2005) https://doi.org/10.1117/12.599062
KEYWORDS: Scanning electron microscopy, Metrology, Optical alignment, Edge detection, Objectives, Local area networks, Silicon, Modulation, Semiconductor manufacturing, Environmental monitoring

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