Prof. Brendan J. Griffin
at Univ of Western Australia
SPIE Involvement:
Conference Program Committee | Author
Publications (3)

PROCEEDINGS ARTICLE | April 15, 2010
Proc. SPIE. 7638, Metrology, Inspection, and Process Control for Microlithography XXIV
KEYWORDS: Microscopes, Metrology, Spatial frequencies, Ions, Image resolution, Electron microscopes, Scanning electron microscopy, Signal processing, Spatial resolution, Contrast transfer function

PROCEEDINGS ARTICLE | March 24, 2008
Proc. SPIE. 6922, Metrology, Inspection, and Process Control for Microlithography XXII
KEYWORDS: Gold, Metrology, Copper, Ions, Silver, Monte Carlo methods, Ion beams, Solids, Aluminum, Helium

PROCEEDINGS ARTICLE | April 5, 2007
Proc. SPIE. 6518, Metrology, Inspection, and Process Control for Microlithography XXI
KEYWORDS: Microscopes, Electron beams, Metrology, Ions, Image resolution, Scanning electron microscopy, Ion beams, Image enhancement, Signal generators, Helium

Conference Committee Involvement (3)
Scanning Microscopies 2012: Advanced Microscopy Technologies for Defense, Homeland Security, Forensic, Life, Environmental, and Industrial Sciences
24 April 2012 | Baltimore, Maryland, United States
Scanning Microscopies 2011: Advanced Microscopy Technologies for Defense, Homeland Security, Forensic, Life, Environmental, and Industrial Sciences
26 April 2011 | Orlando, Florida, United States
Scanning Microscopy 2010
17 May 2010 | Monterey, California, United States
SIGN IN TO:
  • View contact details

UPDATE YOUR PROFILE
Is this your profile? Update it now.
Don’t have a profile and want one?

Back to Top