Dr. Brent C. Bergner
Optical Test and Measurement Consultant at
SPIE Involvement:
Corporate and Exhibitor Committee | Information Technology Committee | Publications Committee | Senior status | Conference Program Committee | Author
Publications (14)

PROCEEDINGS ARTICLE | August 18, 2018
Proc. SPIE. 10749, Interferometry XIX
KEYWORDS: Phase shifting, Data modeling, Sensors, Calibration, Manufacturing, Interferometry, Wavefronts, Optical testing, Phase measurement, Phase shifts

PROCEEDINGS ARTICLE | May 18, 2012
Proc. SPIE. 8374, Next-Generation Spectroscopic Technologies V
KEYWORDS: Lithography, Waveguides, Sensors, Spectroscopy, Surface enhanced Raman spectroscopy, Planar waveguides, Nanoimprint lithography, Reactive ion etching, Semiconducting wafers, Signal detection

PROCEEDINGS ARTICLE | May 12, 2011
Proc. SPIE. 8032, Next-Generation Spectroscopic Technologies IV
KEYWORDS: Refractive index, CMOS sensors, Waveguides, Sensors, Spectroscopy, Image sensors, Integrated optics, Planar waveguides, Waveguide modes, Grazing incidence

PROCEEDINGS ARTICLE | April 20, 2011
Proc. SPIE. 7971, Metrology, Inspection, and Process Control for Microlithography XXV
KEYWORDS: Ellipsometry, Mueller matrices, Data modeling, Spectroscopy, Silicon, Numerical modeling, Process control, Line width roughness, Line edge roughness, Optics manufacturing

PROCEEDINGS ARTICLE | March 23, 2009
Proc. SPIE. 7272, Metrology, Inspection, and Process Control for Microlithography XXIII
KEYWORDS: Modulation, Polarization, Birefringence, Silicon, Reflectivity, Optical testing, Scatterometry, Line width roughness, Scatter measurement, Edge roughness

PROCEEDINGS ARTICLE | April 5, 2007
Proc. SPIE. 6518, Metrology, Inspection, and Process Control for Microlithography XXI
KEYWORDS: Scattering, Dispersion, Dielectrics, Reflectivity, Photonic crystals, Scatterometry, Solids, Process control, Inverse optics, Edge roughness

Showing 5 of 14 publications
Conference Committee Involvement (3)
Interferometry XIX
21 August 2018 | San Diego, California, United States
Interferometry XVII: Techniques and Analysis
17 August 2014 | San Diego, California, United States
Interferometry XVI: Techniques and Analysis
13 August 2012 | San Diego, California, United States
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