Dr. Brian R. Harkness
Group Leader at Dow Corning Corp
SPIE Involvement:
Author
Publications (1)

PROCEEDINGS ARTICLE | May 14, 2004
Proc. SPIE. 5376, Advances in Resist Technology and Processing XXI
KEYWORDS: Packaging, Lithography, Optical lithography, Metals, Image processing, Silicon, Coating, Photomasks, Semiconducting wafers, Standards development

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