Brian L. Harper
at Corning Incorporated
SPIE Involvement:
Author
Publications (1)

PROCEEDINGS ARTICLE | May 20, 2004
Proc. SPIE. 5374, Emerging Lithographic Technologies VIII
KEYWORDS: Refractive index, Prisms, Metrology, Glasses, Interferometry, Ultrasonics, Refraction, Photomasks, Extreme ultraviolet lithography, Spatial resolution

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