Prof. Brian E. Jurczyk
President at Starfire Industries LLC
SPIE Involvement:
Author
Publications (17)

Proceedings Article | 21 March 2007
Proc. SPIE. 6517, Emerging Lithographic Technologies XI
KEYWORDS: Optical components, Lithography, Mirrors, Reticles, Electrodes, Photodiodes, Xenon, Extreme ultraviolet, Plasma, Light

Proceedings Article | 21 March 2007
Proc. SPIE. 6517, Emerging Lithographic Technologies XI
KEYWORDS: Optical components, Mirrors, Light sources, Reticles, Multiplexing, Extreme ultraviolet, Prototyping, Plasma, Light, Fiber optic illuminators

Proceedings Article | 21 March 2007
Proc. SPIE. 6517, Emerging Lithographic Technologies XI
KEYWORDS: Lithography, Prisms, Reflectivity, Xenon, Solids, Extreme ultraviolet, Optimization (mathematics), Circuit switching, EUV optics, Plasma

Proceedings Article | 18 January 2007
Proc. SPIE. 6151, Emerging Lithographic Technologies X
KEYWORDS: Mirrors, Silica, Etching, Ions, Plasma etching, Reactive ion etching, Galactic astronomy, EUV optics, Plasma, Tin

Proceedings Article | 18 January 2007
Proc. SPIE. 6151, Emerging Lithographic Technologies X
KEYWORDS: Gold, Mirrors, Contamination, Sputter deposition, Ions, Silicon, Extreme ultraviolet lithography, Molybdenum, Ruthenium, Tin

Showing 5 of 17 publications
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