Brian Chi-Chuang Lee
Team Member at Taiwan Semiconductor Mfg Co
SPIE Involvement:
Publications (4)

Proceedings Article | 8 March 2016 Paper
Jiarui Hu, Y. L. Chen, K. H. Chen, Brian Lee, Frankie Tsai, C. M. Ke, C. H. Liao, Desmond Ngo, Benny Gosali, Robin Tijssen, Vincent Huang, Ward Tu, Marc Noot, Maryana Escalante Marun, Christian Leewis, Carlo Luijten, Frank Staals, Martijn Van Veen, Francois Furthner, Stuart Young, Kaustuve Bhattacharyya
Proceedings Volume 9778, 977829 (2016)
KEYWORDS: Metrology, Calibration, Scanners, Process control, Interfaces, Optical lithography, Semiconducting wafers, Photoresist materials, Finite element methods, Inspection, Data modeling, Diffraction

Proceedings Article | 10 May 2005 Paper
Chih-Ming Ke, Chi-Chuang Lee, Yu-Hsi Wang, Heng-Jen Lee, Chin-Hsiang Lin, Tsai-Sheng Gau, Burn Lin, Hiroki Kawada, Kazuhiro Ueda, Hiroaki Nomura, Nelson Ren, Takashi Iizumi
Proceedings Volume 5752, (2005)
KEYWORDS: Critical dimension metrology, Scanning electron microscopy, Semiconducting wafers, Line edge roughness, Finite element methods, Metrology, Wafer-level optics, Optical testing, Cadmium, Inspection

Proceedings Article | 10 May 2005 Paper
Tatsuya Maeda, Satoru Iwama, Makoto Nishihara, Daniel Berger, Andrew Berger, Kazuhiro Ueda, Takenouchi Kenichi, Takashi Iizumi
Proceedings Volume 5752, (2005)
KEYWORDS: Video, Semiconducting wafers, Scanning electron microscopy, Video compression, Image resolution, RGB color model, Image compression, Prototyping, Error analysis, Semiconductor manufacturing

Proceedings Article | 28 May 2004 Paper
Proceedings Volume 5377, (2004)
KEYWORDS: Optical lithography, Optics manufacturing, Manufacturing

  • View contact details

Is this your profile? Update it now.
Don’t have a profile and want one?

Back to Top