Brian C. Morgan
at Univ of Maryland College Park
SPIE Involvement:
Author
Publications (1)

PROCEEDINGS ARTICLE | July 1, 2005
Proc. SPIE. 5836, Smart Sensors, Actuators, and MEMS II
KEYWORDS: Microelectromechanical systems, Actuators, Etching, Silicon, Photoresist materials, Capacitance, Finite element methods, Photomasks, Deep reactive ion etching, Device simulation

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