Dr. Brian A. Smith
Field Applications Manager
SPIE Involvement:
Author
Publications (8)

Proceedings Article | 16 April 2011 Paper
Nick Brakensiek, Jennifer Braggin, John Berron, Raul Ramirez, Karl Anderson, Brian Smith
Proceedings Volume 7972, 79722Z (2011) https://doi.org/10.1117/12.879481
KEYWORDS: Semiconducting wafers, Manufacturing, Materials processing, Lithography, Industrial chemicals, Photoresist materials, Photoresist developing, Optical lithography, Bottom antireflective coatings, Wafer testing

Proceedings Article | 2 April 2010 Paper
Brandy Carr, April Evers, Marc Weimer, Brian Smith, Jeff Leith
Proceedings Volume 7638, 763823 (2010) https://doi.org/10.1117/12.846102
KEYWORDS: Semiconducting wafers, Particles, Polymers, Quartz, Crystals, Wafer testing, Defect detection, Systems modeling, Organic materials, Scanning electron microscopy

Proceedings Article | 2 April 2010 Paper
Proceedings Volume 7638, 763824 (2010) https://doi.org/10.1117/12.846690
KEYWORDS: Coating, Semiconducting wafers, Silicon, System on a chip, Particles, Reflectivity, Air contamination, Metrology, Etching, Surface roughness

Proceedings Article | 31 March 2010 Paper
Brian Smith, Raul Ramirez, Jennifer Braggin, Aiwen Wu, Karl Anderson, John Berron, Nick Brakensiek, Carlton Washburn
Proceedings Volume 7639, 763929 (2010) https://doi.org/10.1117/12.846642
KEYWORDS: Semiconducting wafers, Particles, Liquids, Manufacturing, Materials processing, Data modeling, Lithography, Intelligence systems, Product engineering, Process engineering

Proceedings Article | 1 April 2009 Paper
Charles Neef, Brian Smith, Chris James, Zhimin Zhu, Michael Weigand
Proceedings Volume 7273, 727311 (2009) https://doi.org/10.1117/12.814257
KEYWORDS: Carbon, Silicon, Silicon carbide, Etching, Photoresist materials, Lithography, Silicon films, Semiconducting wafers, Chemistry, Epoxies

Showing 5 of 8 publications
SIGN IN TO:
  • View contact details

UPDATE YOUR PROFILE
Is this your profile? Update it now.
Don’t have a profile and want one?

Advertisement
Advertisement
Back to Top