Dr. Brian A. Smith
Field Applications Manager
SPIE Involvement:
Author
Publications (8)

Proceedings Article | 16 April 2011
Proc. SPIE. 7972, Advances in Resist Materials and Processing Technology XXVIII
KEYWORDS: Lithography, Optical lithography, Materials processing, Manufacturing, Photoresist materials, Semiconducting wafers, Wafer testing, Photoresist developing, Industrial chemicals, Bottom antireflective coatings

Proceedings Article | 2 April 2010
Proc. SPIE. 7638, Metrology, Inspection, and Process Control for Microlithography XXIV
KEYWORDS: Metrology, Etching, Air contamination, Particles, Silicon, Coating, Reflectivity, Surface roughness, Semiconducting wafers, System on a chip

Proceedings Article | 2 April 2010
Proc. SPIE. 7638, Metrology, Inspection, and Process Control for Microlithography XXIV
KEYWORDS: Defect detection, Quartz, Polymers, Particles, Crystals, Scanning electron microscopy, Organic materials, Semiconducting wafers, Wafer testing, Systems modeling

Proceedings Article | 31 March 2010
Proc. SPIE. 7639, Advances in Resist Materials and Processing Technology XXVII
KEYWORDS: Lithography, Data modeling, Particles, Materials processing, Manufacturing, Intelligence systems, Semiconducting wafers, Product engineering, Process engineering, Liquids

Proceedings Article | 1 April 2009
Proc. SPIE. 7273, Advances in Resist Materials and Processing Technology XXVI
KEYWORDS: Carbon, Lithography, Etching, Silicon, Chemistry, Photoresist materials, Silicon films, Epoxies, Silicon carbide, Semiconducting wafers

Showing 5 of 8 publications
SIGN IN TO:
  • View contact details

UPDATE YOUR PROFILE
Is this your profile? Update it now.
Don’t have a profile and want one?

Advertisement
Advertisement
Back to Top