Brook H. Chao
Graduate Student at Univ of Texas at Austin
SPIE Involvement:
Author
Publications (7)

SPIE Journal Paper | 1 April 2008
JM3 Vol. 7 Issue 02
KEYWORDS: Etching, Silicon, Lithography, Capillaries, Ultraviolet radiation, Coating, Liquids, Polymers, Optical lithography, Data modeling

Proceedings Article | 26 March 2008
Proc. SPIE. 6921, Emerging Lithographic Technologies XII
KEYWORDS: Etching, Chromium, Quartz, Manufacturing, Metals, Ultraviolet radiation, Photomasks, Optical lithography, Nanoimprint lithography, Lithography

Proceedings Article | 20 March 2008
Proc. SPIE. 6921, Emerging Lithographic Technologies XII
KEYWORDS: Etching, Chemistry, Dielectrics, Back end of line, Lithography, Optical lithography, Resistance, Reactive ion etching, Critical dimension metrology, Metals

Proceedings Article | 21 March 2007
Proc. SPIE. 6517, Emerging Lithographic Technologies XI
KEYWORDS: Etching, Silicon, Lithography, Optical lithography, Back end of line, Diamond, Dielectrics, Copper, Scanning electron microscopy, Liquids

Proceedings Article | 21 March 2007
Proc. SPIE. 6517, Emerging Lithographic Technologies XI
KEYWORDS: Silicon, Dielectrics, Molecules, Lithography, Annealing, Bromine, Front end of line, Back end of line, Chlorine, Optical lithography

Showing 5 of 7 publications
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