Brook H. Chao
Graduate Student at Univ of Texas at Austin
SPIE Involvement:
Author
Publications (7)

SPIE Journal Paper | 1 April 2008
JM3 Vol. 7 Issue 02
KEYWORDS: Etching, Silicon, Lithography, Capillaries, Ultraviolet radiation, Coating, Liquids, Polymers, Optical lithography, Data modeling

Proceedings Article | 26 March 2008 Paper
Proc. SPIE. 6921, Emerging Lithographic Technologies XII
KEYWORDS: Lithography, Optical lithography, Etching, Quartz, Metals, Ultraviolet radiation, Manufacturing, Chromium, Photomasks, Nanoimprint lithography

Proceedings Article | 20 March 2008 Paper
Proc. SPIE. 6921, Emerging Lithographic Technologies XII
KEYWORDS: Lithography, Optical lithography, Etching, Metals, Dielectrics, Chemistry, Resistance, Critical dimension metrology, Reactive ion etching, Back end of line

Proceedings Article | 21 March 2007 Paper
Proc. SPIE. 6517, Emerging Lithographic Technologies XI
KEYWORDS: Lithography, Diamond, Optical lithography, Etching, Copper, Dielectrics, Silicon, Scanning electron microscopy, Liquids, Back end of line

Proceedings Article | 21 March 2007 Paper
Proc. SPIE. 6517, Emerging Lithographic Technologies XI
KEYWORDS: Lithography, Optical lithography, Annealing, Molecules, Dielectrics, Silicon, Chlorine, Bromine, Back end of line, Front end of line

Showing 5 of 7 publications
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