Mr. Brooks Kim Profile

Mr. Brooks Kim

at SAMSUNG Electronics Co Ltd

SPIE Involvement:

Author

Publications (2)

PROCEEDINGS ARTICLE | May 14, 2004

Analysis of solvent effect to control the BARC coating uniformity

Proc. SPIE. 5376, Advances in Resist Technology and Processing XXI

KEYWORDS: Polymers, Coating, Chemistry, Manufacturing, Inspection, Reflectivity, Control systems, Photoresist materials, Humidity, Statistical modeling

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PROCEEDINGS ARTICLE | May 14, 2004

Influence of resin properties to resist performance at ArF lithography

Proc. SPIE. 5376, Advances in Resist Technology and Processing XXI

KEYWORDS: Lithography, Sensors, Polymers, Ultraviolet radiation, Photoresist materials, Polymerization, Palladium, Manganese, Critical dimension metrology, Line edge roughness

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