Dr. Bruce Fender
at Applied Materials Inc
SPIE Involvement:
Author
Publications (2)

PROCEEDINGS ARTICLE | October 16, 2017
Proc. SPIE. 10450, International Conference on Extreme Ultraviolet Lithography 2017
KEYWORDS: Reticles, Contamination, Scanners, Inspection, Reflectivity, Oxygen, Pellicles, Photomasks, Extreme ultraviolet, Extreme ultraviolet lithography

PROCEEDINGS ARTICLE | May 14, 2004
Proc. SPIE. 5376, Advances in Resist Technology and Processing XXI
KEYWORDS: Safety, Polymers, Metals, Copper, Chemistry, Photoresist materials, Aluminum, Photoresist processing, Semiconducting wafers, Back end of line

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