Dr. Bruce Fender
at Applied Materials Inc
SPIE Involvement:
Author
Publications (2)

PROCEEDINGS ARTICLE | October 16, 2017
Proc. SPIE. 10450, International Conference on Extreme Ultraviolet Lithography 2017
KEYWORDS: Photomasks, Extreme ultraviolet, Reticles, Pellicles, Scanners, Contamination, Inspection, Extreme ultraviolet lithography, Reflectivity, Oxygen

PROCEEDINGS ARTICLE | May 14, 2004
Proc. SPIE. 5376, Advances in Resist Technology and Processing XXI
KEYWORDS: Semiconducting wafers, Copper, Metals, Photoresist materials, Polymers, Chemistry, Photoresist processing, Back end of line, Aluminum, Safety

SIGN IN TO:
  • View contact details

UPDATE YOUR PROFILE
Is this your profile? Update it now.
Don’t have a profile and want one?

Back to Top