Dr. Bruce C. Kim
at Arizona State Univ
SPIE Involvement:
Author
Publications (2)

PROCEEDINGS ARTICLE | January 22, 2005
Proc. SPIE. 5717, MEMS/MOEMS Components and Their Applications II
KEYWORDS: Microelectromechanical systems, Etching, Polymers, Metals, Skin, Dielectrics, Silicon, Resistance, Reactive ion etching, Inductance

PROCEEDINGS ARTICLE | August 16, 2004
Proc. SPIE. 5455, MEMS, MOEMS, and Micromachining
KEYWORDS: Microelectromechanical systems, Gold, Oxides, Switches, Waveguides, Electrodes, Silicon, Resistance, Magnetism, Capacitance

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