Dr. Bryan M. Barnes
Physicist at National Institute of Standards and Technology
SPIE Involvement:
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Publications (43)

Proceedings Article | 28 April 2020 Presentation
Proc. SPIE. 11323, Extreme Ultraviolet (EUV) Lithography XI

Proceedings Article | 24 March 2020 Presentation + Paper
Proc. SPIE. 11325, Metrology, Inspection, and Process Control for Microlithography XXXIV
KEYWORDS: Metrology, Data modeling, Computer simulations, Monte Carlo methods, Machine learning, Critical dimension metrology, Inverse scattering problem, Electromagnetic simulation

Proceedings Article | 21 June 2019 Presentation + Paper
Proc. SPIE. 11057, Modeling Aspects in Optical Metrology VII
KEYWORDS: Metrology, Data modeling, Dielectrics, Electrons, Silicon, Reflectivity, Reflectometry, Electromagnetism, Anisotropy

Proceedings Article | 26 March 2019 Presentation + Paper
Proc. SPIE. 10959, Metrology, Inspection, and Process Control for Microlithography XXXIII
KEYWORDS: Metrology, Defect detection, Convolutional neural networks, Data modeling, Scattering, Inspection, Machine learning, Semiconducting wafers, Performance modeling, Defect inspection

Proceedings Article | 19 March 2018 Presentation
Proc. SPIE. 10585, Metrology, Inspection, and Process Control for Microlithography XXXII
KEYWORDS: Signal to noise ratio, Finite-difference time-domain method, Defect detection, Ultraviolet radiation, Inspection, Interference (communication), Line edge roughness, Semiconducting wafers, Ultraviolet detectors, Defect inspection

Showing 5 of 43 publications
Conference Committee Involvement (4)
Modeling Aspects in Optical Metrology VIII
21 June 2021 | Munich, Germany
Metrology, Inspection, and Process Control for Semiconductor Manufacturing XXXV
21 February 2021 | San Jose, California, United States
Instrumentation, Metrology, and Standards for Nanomanufacturing VIII
20 August 2014 | San Diego, California, United States
Instrumentation, Metrology, and Standards for Nanomanufacturing, Optics, and Semiconductors VII
28 August 2013 | San Diego, California, United States
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