Dr. Bryan J. Rice
VP, Product Integration at Inpria Corp
SPIE Involvement:
Fellow status | Author
Publications (38)

PROCEEDINGS ARTICLE | March 23, 2012
Proc. SPIE. 8322, Extreme Ultraviolet (EUV) Lithography III
KEYWORDS: Carbon, Mirrors, Contamination, Molecules, Reflectivity, Extreme ultraviolet, Extreme ultraviolet lithography, Selenium, Ruthenium, Oxidation

PROCEEDINGS ARTICLE | March 23, 2012
Proc. SPIE. 8322, Extreme Ultraviolet (EUV) Lithography III
KEYWORDS: Carbon, Mirrors, Contamination, Chemical species, Molecules, Reflectivity, Extreme ultraviolet, Extreme ultraviolet lithography, Ruthenium, Oxidation

PROCEEDINGS ARTICLE | March 23, 2012
Proc. SPIE. 8322, Extreme Ultraviolet (EUV) Lithography III
KEYWORDS: Lithography, Carbon dioxide, Ions, Nd:YAG lasers, Carbon dioxide lasers, Extreme ultraviolet, Extreme ultraviolet lithography, Pulsed laser operation, Plasma, Tin

PROCEEDINGS ARTICLE | April 1, 2009
Proc. SPIE. 7273, Advances in Resist Materials and Processing Technology XXVI
KEYWORDS: Lithography, Polymers, Molecules, Crystals, Diffusion, Nitrogen, Liquid crystals, Absorbance, Liquids, Absorption

PROCEEDINGS ARTICLE | March 16, 2009
Proc. SPIE. 7274, Optical Microlithography XXII
KEYWORDS: Lithography, Refractive index, Prisms, Nanoparticles, Water, Crystals, Absorbance, Double patterning technology, Immersion lithography, Absorption

PROCEEDINGS ARTICLE | April 15, 2008
Proc. SPIE. 6923, Advances in Resist Materials and Processing Technology XXV
KEYWORDS: Lithography, Refractive index, Nanoparticles, Polymers, Sulfur, Chemistry, Absorbance, Immersion lithography, Line edge roughness, Chlorine

Showing 5 of 38 publications
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