Bryan D. Riffel
at Nikon Precision Inc
SPIE Involvement:
Author
Publications (1)

PROCEEDINGS ARTICLE | March 16, 2009
Proc. SPIE. 7274, Optical Microlithography XXII
KEYWORDS: Microscopes, Diffraction, Reticles, Metrology, Optical lithography, Data modeling, Calibration, Error analysis, Distortion, Diffraction gratings

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