Dr. Bryan D. Vogt
Chemical Engineer at National Institute of Standards and Technology
SPIE Involvement:
Author
Publications (13)

PROCEEDINGS ARTICLE | April 3, 2007
Proc. SPIE. 6519, Advances in Resist Materials and Processing Technology XXIV
KEYWORDS: FT-IR spectroscopy, Optical spheres, Data modeling, Polymers, Spectroscopy, Hydrogen, Photoresist materials, Solids, Line edge roughness, Polymer thin films

PROCEEDINGS ARTICLE | March 22, 2007
Proc. SPIE. 6519, Advances in Resist Materials and Processing Technology XXIV
KEYWORDS: Switches, Optical spheres, Polymers, Diffusion, Computer simulations, 3D modeling, Photoresist materials, Line edge roughness, Photoresist developing, Standards development

PROCEEDINGS ARTICLE | March 22, 2007
Proc. SPIE. 6519, Advances in Resist Materials and Processing Technology XXIV
KEYWORDS: Scattering, Polymers, In situ metrology, X-rays, Interfaces, Silicon, Reflectivity, Photoresist materials, Photoresist developing, Standards development

PROCEEDINGS ARTICLE | March 29, 2006
Proc. SPIE. 6153, Advances in Resist Technology and Processing XXIII
KEYWORDS: FT-IR spectroscopy, Data modeling, Polymers, Glasses, Spectroscopy, Ultraviolet radiation, Hydrogen, Diffusion, Photoresist materials, Chemical reactions

PROCEEDINGS ARTICLE | March 29, 2006
Proc. SPIE. 6153, Advances in Resist Technology and Processing XXIII
KEYWORDS: FT-IR spectroscopy, Scattering, Polymers, Image processing, Diffusion, Reflectivity, Photoresist materials, Image quality, Line edge roughness, Standards development

PROCEEDINGS ARTICLE | March 29, 2006
Proc. SPIE. 6153, Advances in Resist Technology and Processing XXIII
KEYWORDS: Lithography, Quartz, Polymers, Molecules, Crystals, Chemistry, Infrared spectroscopy, Photoresist materials, Photoresist developing, Standards development

Showing 5 of 13 publications
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