Dr. ByeongSoo Lee
at SAMSUNG Electronics Co Ltd
SPIE Involvement:
Author
Publications (5)

PROCEEDINGS ARTICLE | March 24, 2017
Proc. SPIE. 10147, Optical Microlithography XXX
KEYWORDS: Reticles, Calibration, Scanners, Control systems, Distortion, Thermal effects, Optical alignment, Semiconducting wafers, HVAC controls, Overlay metrology, Temperature metrology

PROCEEDINGS ARTICLE | March 24, 2017
Proc. SPIE. 10147, Optical Microlithography XXX
KEYWORDS: Metrology, Sensors, Calibration, Scanners, Computer programming, Time metrology, Optical alignment, Semiconducting wafers, Wafer testing, Overlay metrology

PROCEEDINGS ARTICLE | March 15, 2016
Proc. SPIE. 9780, Optical Microlithography XXIX
KEYWORDS: Near infrared, Optical lithography, Opacity, Sensors, Image processing, Materials processing, Signal processing, Optical alignment, Optics manufacturing, Wafer testing, Overlay metrology

PROCEEDINGS ARTICLE | March 15, 2016
Proc. SPIE. 9780, Optical Microlithography XXIX
KEYWORDS: Lithography, Reticles, Electronics, Optical lithography, Lithographic illumination, Scanners, Image enhancement, Optical alignment

PROCEEDINGS ARTICLE | March 26, 2015
Proc. SPIE. 9426, Optical Microlithography XXVIII
KEYWORDS: Reticles, Electronics, Logic, Optical lithography, Statistical analysis, Control systems, Process control, Optical alignment, Semiconducting wafers, Overlay metrology

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