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Dr. Byeri Yoon
at SAMSUNG SDI Co Ltd
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Author
Publications (1)
Proceedings Article | 25 March 2019 Presentation + Paper
Development of novel thick spin-on carbon hardmask
Byeri Yoon, Seungwook Shin, Youngmin Kim, Yumi Heo, Soyeon Park, Sungho Choi, Miyeon Han, Sanghak Lim
Proceedings Volume 10960, 109601D (2019) https://doi.org/10.1117/12.2515136
KEYWORDS: Etching, Resistance, Carbon, Coating, Solids, Scanning electron microscopy, Semiconductor manufacturing, Optical properties, Optical lithography, Particles
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